Gas content microsensor

摘要

A sensor for monitoring gas content. The sensor comprises a housing defining at least two cavities and a resonating structure positioned in each of the cavities. Each of the resonating structures has a resonant frequency dependent upon a physical characteristic of a gas in its respective cavity. Means for exciting the resonating structures generates output signals therefrom, and means compares the output signals from each of the resonating structures and outputs a comparison signal indicative of a difference between the resonant frequencies of the two structures and the relative gas content of the at least two cavities. <IMAGE>