MULTIPLE BEAM ELLIPSOMETER,申请号EP20020744658-传众专利搜索

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发明名称	MULTIPLE BEAM ELLIPSOMETER
摘要
申请公布号	EP1417476(A1)	申请公布日期	2004.05.12
申请号	EP20020744658	申请日期	2002.06.26
申请人		发明人
分类号	G01B11/06;G01J4/04;G01N21/21;G01N21/95;(IPC1-7):G01N21/21;H01L21/66	主分类号	G01B11/06
代理机构		代理人
主权项
地址

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