GROUND ELECTRODE CARRIER STRUCTURE FOR ION IMPLANTER

摘要

PURPOSE: A ground electrode carrier structure is provided to reduce costs by allowing for a replacement of the slit deformed by a beam rather than the carrier in its entirety. CONSTITUTION: A ground electrode carrier(20) comprises a carrier body(21); a single ground electrode(22) attached to the carrier body, and which has two slits(24); a screw(25) for attaching or detaching the single ground electrode to or from the carrier body; and slits for passage of beams. The carrier body and the single ground electrode are coupled with each other through the screw. Therefore, the slit is easily replaced when the screw is removed, thereby eliminating the necessity of replacement of the carrier body in its entirety.