DISPLAY DEVICE WITH EXCELLENT CHARACTERISTIC

摘要

PURPOSE: A display device with an excellent characteristic is provided to obtain a superior drive and luminance characteristics by vertically designing the direction of an active channel to the secondary grain boundary when manufacturing a drive TFT of a display array by using an SLS(Sequential Lateral Solidification) method. CONSTITUTION: When a boundary of a primary crystal particle is positioned vertically to the current direction from source to drain of the TFT, the boundary of the primary crystal particle is worked as a trap for the movement of a charge carrier. The number of boundaries of primary crystal particles within an active channel region is relatively few than that of boundaries of the secondary crystal particles, which are positioned in parallel or inclined to the growing direction of the crystal particles, and the number is irregular according to the position of the active channel. Therefore, it is difficult to obtain a uniformity of TFT. However, the characteristic of the current mobility is relatively superior to the case when the boundary of the primary crystal particle is positioned in parallel to the current direction from source to drain of the TFT.