| 摘要 |
A method of preparing a test sample for electron microscopy analysis is disclosed. First, a chip segment is attached to a holder of a sample polisher, and a first polishing end of the chip segment is polished by using the sample polisher to generate a first polished cross section. Thereafter, the chip segment is detached from the holder. Further, a carrier segment is attached to the first cross section of the chip segment and the conjoined carrier segment and the chip segment are attached to a pad segment so as to form a stacked structure. Finally, the stacked structure is attached to the holder, and a second polishing end of the chip segment is polished to generate a second polished cross section.
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