发明名称 |
Pressure controlled heat source and method for using such for RTP |
摘要 |
A thermal device with a container having a surface exposed to the substrate, wherein the container further has a heat source and a plurality of thermal shields situated between the surface exposed to the substrate and the heat source. The thermal shields are spaced from one another by a predetermined distance defining one or more gaps therebetween, wherein the predetermined distance is associated with a mean free path of a gas residing therein. Alternatively, the predetermined distance is variable. A pressure of a gas residing within the one or more gaps is controlled, wherein the pressure of the gas switches the thermal conductivity of the gas between generally conductive and generally non-conductive.
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申请公布号 |
US6735378(B1) |
申请公布日期 |
2004.05.11 |
申请号 |
US20030448156 |
申请日期 |
2003.05.29 |
申请人 |
AXCELIS TECHNOLOGIES, INC. |
发明人 |
KELLERMAN PETER L.;CARLSON FREDERICK M. |
分类号 |
H01L21/00;(IPC1-7):F26B19/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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