发明名称 Semiconductor device and method of manufacturing the same
摘要 A semiconductor device comprises an electrode formed above a substrate, an under bump metal (UBM) film on the electrode, the under bump metal film being in the shape of a recess, and a bump electrode embedded in the under bump metal film, the bump electrode having sides and bottom thereof surrounded by the under bump metal film.
申请公布号 US6734568(B2) 申请公布日期 2004.05.11
申请号 US20020228081 申请日期 2002.08.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 MATSUO MIE;MIYATA MASAHIRO;EZAWA HIROKAZU
分类号 H01L21/48;H01L21/60;H01L21/98;H01L23/14;H01L23/485;H01L23/498;H01L25/065;(IPC1-7):H01L23/48;H01L23/52;H01L29/40 主分类号 H01L21/48
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