| 摘要 |
A waveguide photodiode includes an n-type cladding layer, an n-type light confining layer, an i-type light absorption layer, a p-type light confining layer, and a p-type cladding layer buried in an Fe-InP blocking layer on a semiconductor substrate. At least one of the p-type light confining layer and the p-type cladding layer contains a p-type impurity selected from Be, Mg, and C. An undoped layer is preferably located between the i-type light absorption layer and the p-type light confining layer.
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