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发明名称
Skyllekar til anvendelse med ultraren væske
摘要
申请公布号
DK1075878(T5)
申请公布日期
2004.05.10
申请号
DK20000410075T
申请日期
2000.07.12
申请人
VACO MICROTECHNOLOGIES
发明人
ORAVEC, VICTORIA
分类号
B08B3/10;B08B3/12;H01L21/304;H01L21/306;(IPC1-7):B08B3/10
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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