DIGITAL MICROSCOPE FOR MEASURING THREE DIMENSIONAL SHAPE BY COMBINATION OF ILLUMINATION INTENSITY DIFFERENCE AND BINOCULAR PARALLAX

摘要

PURPOSE: A digital microscope for measuring three dimensional shape by the combination of the illumination intensity difference and a binocular parallax is provided to realize the digital microscope with a very low cost. CONSTITUTION: A method for measuring three dimensional shape by the difference of illumination intensity and a binocular parallax includes the steps of: a first step of obtaining three monitoring images in three directions and subsequently obtaining three monitoring images in three directions; a second step of dividing into an inclination surface reflection region and a normal region in response to the amount of the difference after the difference between each of the surface normal vectors calculated at the inclination surface reflection region and the normal region are calculated at the first and the second positions; a third step of reducing the inclination reflection error by reducing the light shade level value; a fourth step of calculating the surface normal vector again by inserting the light shade level value reduced at the third step into the surface normal vector calculation again; a fifth step of calculating the three dimensional shape coordinate of the surface by integrating the surface normal vector; and an eighth step of outputting and storing the calculated result to the monitor(6) of the digital telescope.