ION IMPLANTING APPARATUS AND ION IMPLANTING METHOD USING THE SAME

摘要

PURPOSE: An ion implanting apparatus and an ion implanting method using the same are provided to check the spin state of a motor. CONSTITUTION: An ion implanting apparatus is provided with a motor(106) for rotating a semiconductor substrate(102), an encoder(108) for detecting whether the motor rotates, or not, per a predetermined interval and generating a resultant signal, a decoder(112) for reading the resultant signal generated from the encoder and the first control part(114) for generating an operation failure signal when the motor doesn't work. Preferably, the ion implanting apparatus further includes the second control part(116) for controlling the signal generation of the first control part.