发明名称 |
POSITIVE TYPE PHOTOSENSITIVE COMPOSITION USABLE FOR RECHARGING GAP FORMED BETWEEN SEMICONDUCTOR CHIP AND WAFER IN WAFER-LEVEL PACKAGE |
摘要 |
PURPOSE: Provided is a positive type photosensitive composition usable as an underfill agent to recharge a gap formed between a semiconductor chip and a wafer in the wafer-level package and effective to cure the composition filled in the gap without exposure to light. CONSTITUTION: The positive type photosensitive composition comprises a compound having at least two epoxy groups in one molecule, a curing catalyst or a compound to form the curing catalyst by heat, and sulfonate. The sulfonate is at least one of compounds represented by the formulae 1 to 7. The composition can used for the production of a semiconductor device or a display device by coating the composition over a substrate then exposing the substrate to light; curing a part of the substrate not exposed by heating; and developing the exposed part. |
申请公布号 |
KR20040038731(A) |
申请公布日期 |
2004.05.08 |
申请号 |
KR20030075381 |
申请日期 |
2003.10.28 |
申请人 |
SUMITOMO CHEMICAL CO., LTD. |
发明人 |
YAHAGI ISAO |
分类号 |
G03F7/004;G03F7/00;G03F7/027;G03F7/038;G03F7/039;H01L21/027;H01L23/29;H01L23/31;(IPC1-7):G03F7/027 |
主分类号 |
G03F7/004 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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