发明名称 POSITIVE TYPE PHOTOSENSITIVE COMPOSITION USABLE FOR RECHARGING GAP FORMED BETWEEN SEMICONDUCTOR CHIP AND WAFER IN WAFER-LEVEL PACKAGE
摘要 PURPOSE: Provided is a positive type photosensitive composition usable as an underfill agent to recharge a gap formed between a semiconductor chip and a wafer in the wafer-level package and effective to cure the composition filled in the gap without exposure to light. CONSTITUTION: The positive type photosensitive composition comprises a compound having at least two epoxy groups in one molecule, a curing catalyst or a compound to form the curing catalyst by heat, and sulfonate. The sulfonate is at least one of compounds represented by the formulae 1 to 7. The composition can used for the production of a semiconductor device or a display device by coating the composition over a substrate then exposing the substrate to light; curing a part of the substrate not exposed by heating; and developing the exposed part.
申请公布号 KR20040038731(A) 申请公布日期 2004.05.08
申请号 KR20030075381 申请日期 2003.10.28
申请人 SUMITOMO CHEMICAL CO., LTD. 发明人 YAHAGI ISAO
分类号 G03F7/004;G03F7/00;G03F7/027;G03F7/038;G03F7/039;H01L21/027;H01L23/29;H01L23/31;(IPC1-7):G03F7/027 主分类号 G03F7/004
代理机构 代理人
主权项
地址