发明名称 SEMICONDUCTOR DEVICE WITH METAL ELECTRODES AND SIDEWALLS AND METHOD OF MANUFACTURING THE SAME
摘要 PURPOSE: A semiconductor device and a method of manufacturing the same are provided to restrain a depletion region and improve the performance of a transistor by using metal electrodes and to prevent leakage current by using sidewalls. CONSTITUTION: A semiconductor device includes a semiconductor substrate, a source sidewall insulator, a drain sidewall insulator, a gate insulating layer(19), a gate conductor, a source conductor, and a drain conductor. The semiconductor substrate(1) includes an active region and an isolation region. The isolation region is composed of a first insulator(52,53) and a second insulator(51). The source sidewall insulator includes a first sidewall(7) and a second sidewall(8). The drain sidewall insulator includes a third sidewall(10) and a fourth sidewall(9). The gate conductor(20) is surrounded by the insulating layer between the second and fourth sidewalls. The source conductor(21) is formed between the first and second sidewalls. The drain conductor(22) is formed between the third and fourth sidewalls.
申请公布号 KR20040038710(A) 申请公布日期 2004.05.08
申请号 KR20030075139 申请日期 2003.10.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 SAITO TOMOHIRO
分类号 H01L21/28;H01L21/336;H01L29/423;H01L29/49;H01L29/51;H01L29/78;H01L29/786;(IPC1-7):H01L29/78 主分类号 H01L21/28
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