GAS SUPPLY APPARATUS FOR SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A gas supply apparatus for semiconductor fabricating equipment is provided to prevent a shower head and a gas injecting pipe from being damaged or avoid particles when the shower head and the gas injecting pipe are interconnected by making a connection part come in contact with the gas injecting pipe such that the connection part is formed as one body with the shower head. CONSTITUTION: A chamber(106) is prepared. The shower head(102) supplies gas toward a semiconductor substrate in the chamber. The gas injecting pipe(108) supplies gas to the shower head from the outside of the chamber. The connection part(104) penetrates the wall of the chamber and is connected to the gas injecting pipe.