GAS INJECTION APPARATUS WITH GAS INJECTION NOZZLE

摘要

PURPOSE: A gas injection apparatus with a gas injection nozzle is provided to prevent particles from being generated by a break of the nozzle and form a layer of a uniform thickness by forming gas spraying holes in mutually corresponding positions of the nozzle. CONSTITUTION: A flange transfers and fixes a boat filled with wafers to the gas injecting apparatus. A gas nozzle(136) has the gas spraying holes(138) that are formed in the mutually corresponding positions, installed in the flange. The gas spraying holes are formed in the whole nozzle at regular intervals so that gas can be uniformly sprayed on the entire boat.