Micro-gyrometer for measuring angular speeds, has excitation and detection structures, linked to frame vibrating in two degrees of freedom of movement and mass to excite and detect vibrations in respective orthogonal directions

摘要

The gyrometer has a coupling structure to connect a mass (30) to a frame (50) vibrating in two degrees of freedom of movement in orthogonal directions Ox and Oy of a plate plane. The mass is fixed to anchoring units by a link that allows transmission of vibration movement to the mass. Excitation (70) and detection (90) structures are linked to the frame and mass to excite and detect the vibration in respective directions.