Method and an apparatus for determining the dimension of a feature by varying a resolution determining parameter

摘要

A metrology tool, such as a scanning electron microscope, includes a control unit that calculates the dimension of a feature on the basis of a plurality of measurement results obtained with different resolution conditions. A mathematical function may be determined that represents the measurement results and an extreme value of the function may be calculated to obtain a final dimension of the feature. The actual dimension may thus be estimated more precisely than by a single measurement with an automatically determined "optimum" resolution of the metrology tool.