发明名称 NON-VOLATILE MEMORY COMPATIBLE WITH LOGIC DEVICES AND FABRICATION METHOD THEREOF
摘要 A non-volatile memory compatible with logic devices and processes are described. The non-volatile memory has a substrate, a first dielectric layer, a first gate, a second gate, a second dielectric layer, a plurality of spacers and a source/drain. A first active region and a second active region are formed on the substrate. When hot carrier effect occurs near the drain, the second dielectric layer located under the spacers is able to retain electrons so that the non-volatile memory is programmed.
申请公布号 US2004087096(A1) 申请公布日期 2004.05.06
申请号 US20020287711 申请日期 2002.11.05
申请人 JANG WEN-YUEH 发明人 JANG WEN-YUEH
分类号 H01L21/8234;H01L21/8246;H01L27/105;H01L29/423;(IPC1-7):H01L21/336 主分类号 H01L21/8234
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