发明名称 |
Method and apparatus for delivering precursors |
摘要 |
A method and apparatus for delivering precursors to a chemical vapor deposition or atomic layer deposition chamber is provided. The apparatus includes a temperature-controlled vessel containing a precursor. An energy source is used to vaporize the precursor at its surface such that substantially no thermal decomposition of the remaining precursor occurs. The energy source may include a carrier gas, a radio frequency coupling device, or an infrared irradiation source. After the precursor is exposed to the energy source, the vaporized portion of the precursor is transported via a temperature-controlled conduit to a chemical vapor deposition or atomic deposition chamber for further processing.
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申请公布号 |
US2004083963(A1) |
申请公布日期 |
2004.05.06 |
申请号 |
US20020223175 |
申请日期 |
2002.08.19 |
申请人 |
DANDO ROSS S.;CARPENTER CRAIG M.;MARDIAN ALLEN P.;DERDERIAN GARO J.;GEALY DAN |
发明人 |
DANDO ROSS S.;CARPENTER CRAIG M.;MARDIAN ALLEN P.;DERDERIAN GARO J.;GEALY DAN |
分类号 |
C23C16/44;C23C16/448;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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