发明名称 Stability of ion beam generated alignment layers by surface modification
摘要 A method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions, and reactive gas is introduced to the ion beam to saturate dangling bonds on the surface. Another method for preparing an alignment layer surface provides a surface on the alignment layer. The surface is bombarded with ions and quenched with a reactive component to saturate dangling bonds on the surface.
申请公布号 US2004086662(A1) 申请公布日期 2004.05.06
申请号 US20030606523 申请日期 2003.06.26
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CALLEGARI ALESSANDRO C.;CHAUDHARI PRAVEEN;DOANY FUAD E.;DOYLE JAMES P.;GALLIGAN EILEEN A.;GLOWNIA JAMES H.;HOUGHAM GARETH G.;LACEY JAMES A.;LIEN SHUI-CHIH;LU MINHUA;ROSENBLUTH ALAN E.;YANG KEI-HSIUNG
分类号 B01J19/12;C01B31/02;C23C14/48;C23C14/58;G02F1/1337;(IPC1-7):C23C16/00 主分类号 B01J19/12
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