发明名称 |
Apparatus and process for annealing a multilayer body, and multilayer body of this type |
摘要 |
A process for annealing large-area multilayer bodies by supplying a quantity of energy at an annealing rate of at least 1° C./s. To suppress temperature inhomogeneities during the annealing, different partial quantities of the quantity of energy are supplied to the layers of the multilayer body with a local and temporal resolution. The multilayer body is annealed in a container which has a base and a cover made from glass-ceramic. The process is used to produce a thin-film solar module.
|
申请公布号 |
US2004087172(A1) |
申请公布日期 |
2004.05.06 |
申请号 |
US20030692728 |
申请日期 |
2003.10.27 |
申请人 |
SHELL SOLAR GMBH |
发明人 |
PROBST VOLKER |
分类号 |
H01L31/04;H01L31/032;H01L31/0336;H01L31/18;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
H01L31/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|