发明名称 |
TUNABLE OPTICAL INSTRUMENTS |
摘要 |
An optical instrument including: a thermo-optically tunable, thin film, free-space interference filter having a tunable passband which functions as a wavelength selector, the filter including a sequence of alternating layers of amorphous silicon and a dielectric material deposited one on top of the other and forming a Fabry-Perot cavity structure having: a first multi-layer thin film interference structure forming a first mirror; a thin-film spacer layer deposited on top of the first multi-layer interference structure, the thin-film spacer layer made of amorphous silicon; and a second multi-layer thin film interference structure deposited on top of the thin-film spacer layer and forming a second mirror; a lens for coupling an optical beam into the filter; an optical detector for receiving the optical beam after the optical beam has interacted with the interference filter; and circuitry for heating the thermo-optically tunable interference filter to control a location of the passband. |
申请公布号 |
EP1415191(A1) |
申请公布日期 |
2004.05.06 |
申请号 |
EP20020752665 |
申请日期 |
2002.08.02 |
申请人 |
AEGIS SEMICONDUCTOR |
发明人 |
DOMASH, LAWRENCE;MA, EUGENE;MURANO, ROBERT;NEMCHUK, NIKOLAY;PAYNE, ADAM;SHERMAN, STEVEN;WAGNER, MATTHIAS;WU, MING |
分类号 |
G02B5/02;G01N21/25;G02B5/28;G02B6/34;G02B6/42;G02F1/01;G02F1/21 |
主分类号 |
G02B5/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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