| 摘要 |
A polishing tool such as a fixed abrasive polishing tool or a polishing pad is used in a polishing apparatus. A workpiece is pressed against a polishing surface of the polishing tool containing a resin to bring the workpiece into sliding contact with the polishing tool, thereby polishing the workpiece. The polishing surface of the polishing tool is kept at a temperature equal to or lower than a glass transition temperature of the polishing tool. |
