| 摘要 |
This invention relates to a corrosion-resistant member comprising a substrate made of a ceramic material and a fluorine-containing film which coats at least a part of a surface of the substrate, and the film is formed by directly contacting the substrate with a fluorine-containing compound and has a thickness of 0.01-5.0 mu m and the substrate contains silicon in an amount of not more than 0.5% by weight when calculated as silicon oxide. Thereby, a change in weight due to corrosion can be decreased and at the same time the generation of particles during the plasma treatment can be further controlled. |
