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发明名称
KOMPOSITSTRUKTUR FÜR ELEKTRONISCHE MIKROSYSTEME SOWIE VERFAHREN ZUR HERSTELLUNG DER KOMPOSITSTRUKTUR
摘要
申请公布号
DE50101868(D1)
申请公布日期
2004.05.06
申请号
DE20015001868
申请日期
2001.08.31
申请人
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
发明人
GUETTLER, HERBERT;KOIDL, PETER;SEELMANN-EGGEBERT, MATTHIAS
分类号
C23C16/02;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/02
代理机构
代理人
主权项
地址
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