发明名称 |
Clog-resistant gas delivery system |
摘要 |
Processing gases reactive with each other are provided in parallel to a processing chamber through separate delivery lines including mass flow controllers devoted to each line. The parallel delivery lines meet in a mixing manifold located proximate to the processing chamber and relatively far downstream from the mass flow controllers and other flow-constricting components of the gas delivery system. The continuous high flow of gas provided by the devoted mass flow controllers may maintain a sufficiently high pressures on the delivery lines to prevent partial clogging from leading to a further drop in pressure and complete obstruction of the delivery line.
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申请公布号 |
US2004083962(A1) |
申请公布日期 |
2004.05.06 |
申请号 |
US20020222398 |
申请日期 |
2002.08.15 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BANG WON;WANG YEN-KUN;GHANAYEM STEVE |
分类号 |
C23C16/44;C23C16/448;C23C16/455;C23C16/52;(IPC1-7):C23C16/00 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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