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发明名称
Halbleiterlaservorrichtung
摘要
申请公布号
DE69815461(T2)
申请公布日期
2004.05.06
申请号
DE19986015461T
申请日期
1998.09.30
申请人
MITSUI CHEMICALS, INC.
发明人
NAITO, YUMI;OKADA, SATORU;FUJIMOTO, TSUYOSHI
分类号
H01S5/12;H01S5/223;H01S5/343;(IPC1-7):H01S5/32;H01S5/10;H01L33/00
主分类号
H01S5/12
代理机构
代理人
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地址
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