发明名称 |
Device for cleaning tip and side surfaces of a probe |
摘要 |
A device for cleaning the tip portion and the side surfaces of a probe has two or more different kinds of intermediate sheets affixed to a substrate in a side-by-side relationship with respect to each other. One of these intermediate sheets is an elastic sheet having an elastic property. Another intermediate sheet of a different kind is a plastic sheet which is less elastic. The tip portion of a probe is cleaned by a polishing layer affixed to the elastic sheet. The side surfaces of the probe are cleaned by a polishing layer affixed to the plastic sheet. A porous foamed sheet having openings on its surface and having air bubbles inside may be used as the elastic sheet. A polishing layer is formed on the surface of the foamed sheet, having a porous surface with openings corresponding to the openings on the foamed sheet. A spacer may be provided between the substrate and the plastic sheet for adjusting the heights of the polishing layers formed over the intermediate sheets. |
申请公布号 |
US2004083568(A1) |
申请公布日期 |
2004.05.06 |
申请号 |
US20020289494 |
申请日期 |
2002.11.05 |
申请人 |
NIHON MICROCOATING CO., LTD. |
发明人 |
MORIOKA IZURU;SATO SATORU |
分类号 |
G01R31/26;B08B1/00;B24D3/00;B24D15/04;G01R1/06;G01R1/067;G01R3/00;G01R31/28;H01L21/66;(IPC1-7):B08B1/00 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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