METHOD OF CLEANING ION SOURCE, AND CORRESPONDING APPARATUS/SYSTEM
摘要
A method and/or system for cleaning an ion source is/are provided. In certain embodiments of this invention, both the anode and cathode of the ion source are negatively biased during at least part of a cleaning mode. Ions generated are directed toward the anode and/or cathode in order to remove undesirable build-ups from the same during cleaning.
申请公布号
WO2004038754(A2)
申请公布日期
2004.05.06
申请号
WO2003US33095
申请日期
2003.10.20
申请人
GUARDIAN INDUSTRIES CORP.;ADVANCED ENERGY INDUSTRIES, INC.
发明人
ADVANCED ENERGY INDUSTRIES, INC.;LUTEN, HENRY, A.;VEERASAMY, VIJAYEN, S.;FRATI, MAXIMO;SHAW, DENISE, R.