Semiconductor optical device, semiconductor laser device, semiconductor optical modulation device, and semiconductor optical integrated device

摘要

An optical waveguide is provided on an n-type buffer layer. The optical waveguide is formed into a mesa form. A high resistance layer narrows a drive current path through the optical waveguide. Two trenches are formed such that their bottoms are in contact with the high resistance layer. This can effectively narrow the drive current path in the semiconductor laser device part.