| 摘要 |
An apparatus for moving and positioning a device (14) includes a stage assembly (24) and a first mirror component (226). The stage assembly (24) includes a device stage (202) that retains the device (14) and a stage mover assembly (204) that moves the device stage (202). The first mirror component (226) is secured to the device stage (202) and is used for monitoring the position the device stage (202). A first fluid gap (348) exists between the first mirror component (226) and the device stage (202). The first fluid gap (348) provides squeeze film damping of the first mirror component (226) along a first axis. Additionally a second fluid gap (352) can exist between the first mirror component (226) and the device stage (202). The second fluid gap (352) provides squeeze film damping of the first mirror component (226) along a second axis that is orthogonal to the first axis.
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