| 摘要 |
[Object] To provide a method for forming a high-performance thin-film at low cost using a liquid material in safety, an apparatus for forming a thin-film, a method for manufacturing a semiconductor device, an electro-optical unit, and an electronic apparatus. [Solving Means] An apparatus for forming a thin-film includes a coating unit 21 for applying a liquid material containing a thin-film component onto a substrate and also includes heat-treating units 22, 23, and 24 for heating the substrate applied with the liquid material. The coating unit 21 and the heat-treating units 22, 23, and 24 each include a control means for controlling the atmosphere in a treating chamber for treating the substrate.
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