MEMS GYROSCOPE WITH PARAMETRIC GAIN

摘要

A microelectromechanical (MEMS) gyroscope has one or more proof masses mechanically coupled to a substrate by springs. A motor force drives the pro of masses at their resonant frequency in one direction, 180 degrees out of phas e with each other in the case of a dual proof mass gyroscope. Sense electrodes sense motion of the proof masses in response to a Coriolis force. The motion caused by the Coriolis force is perpendicular to the motion caused by the motor force. An AC pump voltage at twice the motor frequency is applied to t he sense electrodes to provide parametric amplification of the Coriolis force. The AC pump voltage alters the mechanical and electrical gain of the gyrosco pe.