发明名称 |
MANUFACTURING FILM BULK ACOUSTIC RESONATOR FILTERS |
摘要 |
A film bulk acoustic resonator filter (10) may be formed with a plurality of interconnected series and shunt film bulk acoustic resonators (38) formed on the same membrane (35). Each of the film bulk acoustic resonators (38) may be formed from a common lower conductive layer which is defined to form the bottom electrode (32) of each film bulk acoustic resonator (38). A common top conductive layer may be defined to form each top electrode (36) of each film bulk acoustic resonator (38). A common piezoelectric film layer (34), that may or may not be patterned, forms a continuous or discontinuous film. <IMAGE> |
申请公布号 |
AU2003298535(A1) |
申请公布日期 |
2004.05.04 |
申请号 |
AU20030298535 |
申请日期 |
2003.08.01 |
申请人 |
INTEL CORPORATION |
发明人 |
EYAL BAR-SADEH;VALLURI RAO;JOHN HECK;QING MA;QUAN TRAN;ALEXANDER TALALYEVSKY;EYAL GINSBURG;LI-PENG WANG |
分类号 |
H03H9/24;H03H3/02;H03H9/56;(IPC1-7):H03H3/00 |
主分类号 |
H03H9/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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