发明名称 HIGH TEMPERATURE, HIGH STRENGTH, COLORABLE MATERIALS FOR DEVICE PROCESSING SYSTEMS
摘要 Electrostatic-discharge safe devices for processing electronic components, e.g., matrix trays, chip trays, and wafer carriers are disclosed that are made from a mixture of a high temperature, high strength polymer and at least one metal oxide, and optionally with at least one pigment. The use of the metal oxides as conductive materials advantageously allows for light-colored electrostatic-discharge safe materials to be made. Such materials may be colored with pigments without compromise of material performance specifications.
申请公布号 AU2003279239(A1) 申请公布日期 2004.05.04
申请号 AU20030279239 申请日期 2003.10.09
申请人 ENTEGRIS, INC. 发明人 ROBERT BUCHA;CHARLES, W. EXTRAND
分类号 F16L1/00;H01L21/673 主分类号 F16L1/00
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