发明名称 |
Dual robot processing system |
摘要 |
A substrate processing system having a transfer chamber having two processing chambers and two load lock chambers coupled thereto is generally provided. The transfer chamber includes a body having a first transfer area and a second transfer area defined therein on either side of a center axis. A first passage couples one of the load locks with the first transfer area and a second passage couples the other one of the load locks with the second transfer area. The first passage and the second passage form an acute angle about the center axis. A transfer platform is disposed between the first transfer area and the second transfer area. A first transfer robot and a second transfer robot are disposed in the first and second transfer areas, respectively. Each robot is adapted to transfer substrates between the load locks, the transfer platform and a processing chamber.
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申请公布号 |
US6729824(B2) |
申请公布日期 |
2004.05.04 |
申请号 |
US20010017039 |
申请日期 |
2001.12.14 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
LEI LAWRENCE C.;KORI MORIS |
分类号 |
B65G49/07;H01L21/00;H01L21/677;(IPC1-7):B65G49/07 |
主分类号 |
B65G49/07 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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