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发明名称
A METHOD FOR PLASMA ETCHING PERFORMANCE ENHANCEMENT
摘要
申请公布号
AU2003282718(A1)
申请公布日期
2004.05.04
申请号
AU20030282718
申请日期
2003.10.06
申请人
LAM RESEARCH CORPORATION
发明人
ZHISONG HUANG
分类号
H01L21/311;H01L21/768;(IPC1-7):H01L21/00
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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