发明名称 |
NANOPELLETS AND METHOD OF MAKING NANOPELLETS |
摘要 |
A method for making packets of nanostructures is presented. The method includes etching trenches in a silicon substrate. Nanostructures are grown in the trenches. The trenches are then filled with a filler material. Any filler and/or nanostructure material extending beyond the trench is removed. The silicon substrate is etched away, resulting in a nanopellet surrounding the nanostructures and wherein each nanostructures has a generally uniform length and direction. Nanostructures can comprise nanotubes, nanowires and nanofibers. The method eases the manipulation of nanostructures while providing geometrical uniformity. |
申请公布号 |
AU2003282558(A1) |
申请公布日期 |
2004.05.04 |
申请号 |
AU20030282558 |
申请日期 |
2003.10.09 |
申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY |
发明人 |
SANG-GOOK KIM;TAREK, A. EL AGUIZY;JEUNG-HYUN JEONG;YONGBAE JEON |
分类号 |
C01B31/02;C30B1/00;C30B29/60;H01L21/20;H01L21/302;H01L21/36;H01L21/461;(IPC1-7):C01B31/02 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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