发明名称 NANOPELLETS AND METHOD OF MAKING NANOPELLETS
摘要 A method for making packets of nanostructures is presented. The method includes etching trenches in a silicon substrate. Nanostructures are grown in the trenches. The trenches are then filled with a filler material. Any filler and/or nanostructure material extending beyond the trench is removed. The silicon substrate is etched away, resulting in a nanopellet surrounding the nanostructures and wherein each nanostructures has a generally uniform length and direction. Nanostructures can comprise nanotubes, nanowires and nanofibers. The method eases the manipulation of nanostructures while providing geometrical uniformity.
申请公布号 AU2003282558(A1) 申请公布日期 2004.05.04
申请号 AU20030282558 申请日期 2003.10.09
申请人 MASSACHUSETTS INSTITUTE OF TECHNOLOGY 发明人 SANG-GOOK KIM;TAREK, A. EL AGUIZY;JEUNG-HYUN JEONG;YONGBAE JEON
分类号 C01B31/02;C30B1/00;C30B29/60;H01L21/20;H01L21/302;H01L21/36;H01L21/461;(IPC1-7):C01B31/02 主分类号 C01B31/02
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