发明名称 |
Semiconductor wafer handler |
摘要 |
A semiconductor wafer handler comprises a ring (70) attached to a hub (80) by a plurality of spokes (90). Vacuum is applied to the surface of the semiconductor wafer through orifices (100) containing in the ring (70). Water and/or nitrogen can be applied to the surface of the semiconductor wafer through orifices (110) contained in the spokes (90).
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申请公布号 |
US6729947(B1) |
申请公布日期 |
2004.05.04 |
申请号 |
US20020287350 |
申请日期 |
2002.11.04 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
SCHUTTE CHRISTOPHER L.;WALLACE GEORGE T. |
分类号 |
B24B41/06;H01L21/683;(IPC1-7):B24B47/00 |
主分类号 |
B24B41/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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