ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM-USE REFLECTION MIRROR, ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM, APPLICATION METHOD FOR ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM, PRODUCTION METHOD FOR ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM, ULTRA-SHORT ULTRAVIOLET EXPOSURE SYSTEM, AND APPLICATION METHOD FOR ULTRA-SHORT ULTRAVIOLET EXPOSU,申请号AU20030271130-传众专利搜索

发明名称	ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM-USE REFLECTION MIRROR, ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM, APPLICATION METHOD FOR ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM, PRODUCTION METHOD FOR ULTRA-SHORT ULTRAVIOLET OPTICAL SYSTEM, ULTRA-SHORT ULTRAVIOLET EXPOSURE SYSTEM, AND APPLICATION METHOD FOR ULTRA-SHORT ULTRAVIOLET EXPOSU
摘要
申请公布号	AU2003271130(A1)	申请公布日期	2004.05.04
申请号	AU20030271130	申请日期	2003.10.08
申请人	NIKON CORPORATION	发明人	KATSUHIKO MURAKAMI
分类号	G02B5/28;G02B7/00;G03F7/20;G21K1/06;(IPC1-7):H01L21/027;G02B5/08	主分类号	G02B5/28
代理机构		代理人
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