| 摘要 |
An electrostatic chuck which allows sufficiently rapid temperature rising/dropping thereof, in case that the diameter of a ceramic substrate is 190 mm or more or especially in case that the diameter of the ceramic substrate is quite large, exceeding 300 mm. The electrostatic chuck includes a ceramic substrate equipped with a temperature controlling means, an electrostatic electrode formed on the ceramic substrate, and a ceramic dielectric film provided on the electrostatic electrode. The ceramic substrate has a diameter exceeding 190 mm and a thickness of 20 mm or less, and the ceramic dielectric film contains oxygen in an amount of 0.1 to 20 weight %.
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