发明名称 |
Method and apparatus for implementing dynamic qualification recipes |
摘要 |
A method includes retrieving current state information associated with a process tool. A dynamic qualification recipe is generated based on the current state information. The dynamic qualification recipe is provided to the process tool for subsequent processing of at least one test workpiece. A system includes a process tool and a qualification recipe controller. The qualification recipe controller is configured to retrieve current state information associated with the process tool, generate a dynamic qualification recipe based on the current state information, and provide the dynamic qualification recipe to the process tool for subsequent processing of at least one test workpiece.
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申请公布号 |
US6732007(B1) |
申请公布日期 |
2004.05.04 |
申请号 |
US20020164133 |
申请日期 |
2002.06.05 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
PASADYN ALEXANDER J.;BODE CHRISTOPHER A. |
分类号 |
H01L21/00;(IPC1-7):G06F19/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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