Laser output control method, laser apparatus and exposure apparatus

摘要

The present invention relates to a method of controlling the output of laser pulses where laser pulses are continuously emitted while performing charging for each pulse. This method comprises: a pre-charging step for commencing charging for a next pulse with a previously set first charging voltage value as a target; a voltage computation step for computing a second charging voltage value required for the next pulse during the pre-charging step; and a fine charging step for continuing charging for the next pulse with the second charging voltage value as the target instead of the first charging voltage value, when the second charging voltage value is computed in the voltage computation step.