| 摘要 |
PURPOSE: A semiconductor active mirror and its fabrication method, and a shutter used as an aperture stop also are provided, which are used both as a shutter and an aperture stop using the semiconductor active mirror using a MEMS technology. CONSTITUTION: The semiconductor active mirror includes a semiconductor substrate, and a static electricity generation unit provided on the semiconductor substrate. At least two elastic supporting member(15) are arranged on the semiconductor substrate separated from the static electricity generation unit. And a mirror body(17) is supported by the elastic supporting member and is arranged by being floated from the static electricity generation unit.
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