MICRO GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A micro gas sensor and a method for manufacturing the same are provided to improve adhesive force of gas sensing material by filling the gas sensing material in an opening formed on an upper substrate. CONSTITUTION: A micro gas sensor includes a lower substrate(100). A detection electrode pattern(111) and a heater electrode pattern(121) are aligned on the lower substrate(100) in a non-contact manner. An upper substrate(200) is bonded to an upper surface of the lower substrate(100). The upper substrate(200) is formed with an opening(201) for partially exposing the detection electrode pattern(111) and the heater electrode pattern(121). Gas sensing material(300) is filled in the opening(201). The lower substrate(100) includes a silicon substrate.