| 摘要 |
PURPOSE: A semiconductor manufacturing apparatus is provided to be capable of measuring the rotation speed of a wafer in real time. CONSTITUTION: A semiconductor manufacturing apparatus is provided with a process chamber(100), a support part(300) installed in the process chamber for loading a substrate, a rotation part(400) for rotating the support part, a heating part for heating the substrate, and a measurement part(500) for measuring the rotation speed of the substrate. Preferably, the semiconductor manufacturing apparatus further includes a display part(600) for displaying the rotation speed of the support part and an alarm part(700) for generating alarm sound when the rotation speed of the substrate is deviated from a predetermined range. Preferably, the process chamber is used for annealing the substrate.
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