| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device comprising a scanning circuit which enables testing of a process monitor as well as semiconductor elements. SOLUTION: A semiconductor device comprises the semiconductor elements (203, 207), the scanning circuit (220) connectable to the semiconductor elements (203, 207) for testing the performance thereof, and the process monitor (PM) which is arranged in a path subjected to the testing by the scanning circuit (220). COPYRIGHT: (C)2004,JPO
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