STERILIZATION METHOD USING TEMPERATURE-CONTROLLED DIFFUSION PATH

摘要

PROBLEM TO BE SOLVED: To provide a sterilization method using a temperature-controlled diffusion path.

SOLUTION: A chemical vapor sterilization method is improved by controlling the temperature of the diffusion path between a vaporizer and a sterilization chamber so as to condense and liquefy and then re-vaporize at least a part of the vapor.

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