| 摘要 |
PROBLEM TO BE SOLVED: To provide a joined body of a silicon carbide-based member and its manufacturing method by which the joining of≥2 silicon carbide-based members is uniformly performed, the silicon carbide-based member having a complicated shape or even a shape from a small sized one to a large sized one is joined without damaging the appearance and the manufacture is performed at high yield. SOLUTION: The joined body of the silicon carbide-based members is obtained by applying slurry of silicon powder and a resin on joining surfaces of the silicon carbide-based members to be stuck, firing the silicon carbide-based members stuck to each other under vacuum or an inert atmosphere at 900-1300°C to carbonize the resin, firing the the silicon carbide based member after the resin is carbonized under vacuum or the inert gas atmosphere at≥1300°C to react silicon with carbon from the resin and to sinter to form silicon carbide on the joining surface. COPYRIGHT: (C)2004,JPO
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