LAYERING AND PATTERNING METHOD FOR CARBON NANOTUBES USING CHEMICAL SELF ASSEMBLY

摘要

PURPOSE: A layering and patterning method for carbon nanotubes is provided to easily form a membrane of carbon nano tube monolayer or multilayer on various substrates such as glass, silicon wafer and plastic, by using a conventional photolithography process. CONSTITUTION: The patterning method for carbon nanotubes comprises the steps of: (a) carrying out surface treatment of a substrate to have an exposed amino group on its surface; (b) treating the substrate with aminoalkyl carboxylic acid having a structure of R-NH-(CH2)n-COOH(wherein, R is an acid-dissociative functional group, and n is natural number of 1-50) as a linker in the presence of a coupling agent, to form an amide bond between the amino group of the substrate and the carboxyl group of the aminoalkylcarboxylic acid; (c) coating a photo acid generator on the substrate, irradiating UV light through a patterned photomask to the substrate, developing it with an alkali developing solution to form positive patterns where a reactive amino group is exposed to the substrate surface; and (d) reacting the substrate with the carboxylated carbon nano tube in the presence of a coupling agent to form a carbon nano tube layer.